JPH0428014Y2 - - Google Patents
Info
- Publication number
- JPH0428014Y2 JPH0428014Y2 JP19140181U JP19140181U JPH0428014Y2 JP H0428014 Y2 JPH0428014 Y2 JP H0428014Y2 JP 19140181 U JP19140181 U JP 19140181U JP 19140181 U JP19140181 U JP 19140181U JP H0428014 Y2 JPH0428014 Y2 JP H0428014Y2
- Authority
- JP
- Japan
- Prior art keywords
- light
- lens
- scale
- reflected
- output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000003384 imaging method Methods 0.000 claims description 16
- 230000003287 optical effect Effects 0.000 claims description 8
- 230000000903 blocking effect Effects 0.000 claims description 3
- 230000001427 coherent effect Effects 0.000 claims description 3
- 230000004907 flux Effects 0.000 claims description 2
- 230000010363 phase shift Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 6
- 238000006073 displacement reaction Methods 0.000 description 6
- 238000005259 measurement Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19140181U JPS5896212U (ja) | 1981-12-22 | 1981-12-22 | 光学式スケ−ル読取装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19140181U JPS5896212U (ja) | 1981-12-22 | 1981-12-22 | 光学式スケ−ル読取装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5896212U JPS5896212U (ja) | 1983-06-30 |
| JPH0428014Y2 true JPH0428014Y2 (en]) | 1992-07-07 |
Family
ID=30104866
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19140181U Granted JPS5896212U (ja) | 1981-12-22 | 1981-12-22 | 光学式スケ−ル読取装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5896212U (en]) |
-
1981
- 1981-12-22 JP JP19140181U patent/JPS5896212U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5896212U (ja) | 1983-06-30 |
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